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詳細(xì)介紹
MetOne 3400系列專用高壓氣體擴(kuò)散器（減壓閥）
高壓氣體經(jīng)過 Diffuser (30~150 Psi) 調(diào)整至常壓狀態(tài)后再經(jīng)由顆粒計(jì)數(shù)器讀出目前氣體中粒子分布情形 ，可量測范圍0.1um-5um。應(yīng)用于半導(dǎo)體廠、光電廠中高壓氣體如PN2、O2、H2、CDA等。
高壓氣體經(jīng)過 Diffuser (30~150 Psi) 調(diào)整至常壓狀態(tài)后再經(jīng)由顆粒計(jì)數(shù)器讀出目前氣體中粒子分布情形 ，可量測范圍0.1um-5um。應(yīng)用于半導(dǎo)體廠、光電廠中高壓氣體如PN2、O2、H2、CDA等。
Specifications
Specifications are subject to change without notice.
| Specification | Details | |
| Dimensions (L x D) | 19.1 x 5.7 cm (7.5 x 2.25 in.) | |
| Material | Nickel-plated aluminum and stainless steel | |
| Weight | 0.57 kg (1.25 lb) | |
| Pressure range | 0.1 CFM, 1.0 CFM or 50 LPM diffuser: 206–1034 kPa (30–150 psig) 100 LPM diffuser: 344–1034 kPa (50–150 psig) | |
| Flow rate | 0.1 CFM, 1.0 CFM, 50 LPM or 100 LPM | |
| Sample gas | Dry, inert and non-toxic | |
| Inlet connector | Stainless #4 VCR fitting (modified) | |
| Outlet connector |
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| Orifice material | Sapphire (at the inlet end) | |
| Exhaust port | ?-in. NPT |
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