OAI 800 MBA 型光學正面和背面光刻機系統(tǒng)

800型光學正面和背面光刻機系統(tǒng)

OAI模型800光刻機是半自動,four-camera、光學正面和背面光刻機。它提供極其精確的(1碌m - 2 m碌)對準精度,旨在大大*紅外背后對準器性能的一個非常有競爭力的價格。通用模型800光刻機是理想的用于低產量、研發(fā)實驗室和大學。

模型800光刻機配置了各種各樣的的OAI紫外線光源,在權力范圍2千瓦。光刻機工具可以容納基質8英寸廣場,以及晶片卡盤定位允許方便裝卸。這個劃算的光刻機還包括機動背后焦點,電動汽車水準和汽車差距設置。
建立在隔振平臺,固定器總成擔保的固定不變的面具對準精度和可重復性。使用易讀的操作簡化,PLC觸摸屏。培訓時間短,操作員可以有效地學習使用光刻機在不到一個小時。

Model 800 Optical Front and Backside Mask Aligner System

The OAI Model 800 Mask Aligner is a semi-automated, four-camera, optical front and backside mask Aligner. It delivers ultra-precise (1碌m-2碌m) alignment accuracy and is designed to greatly surpass the performance of any IR backside Aligner at an extremely competitive price. The versatile Model 800 mask Aligner is ideal for use in low volume production, R&D labs, and universities.

The Model 800 Mask Aligner is configured with a wide variety of OAI UV light sources that range in power up to 2KW. The mask Aligner tooling can accommodate substrates up to 8-inch square, and the wafer chuck is positioned to allow for easy loading and unloading. This cost-effective mask Aligner also features motorized backside focus, motorized auto leveling and auto gap setting.

Built on a vibration isolation platform, the fixed mask holder assembly guarantees alignment accuracy and repeatability. Operation is simplified using the easy-to-read, PLC touch-screen. Training time is short; an operator can learn to use the mask Aligner effectively in less than one hour.