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NEW ELS-BODEN Electron Beam Lithography System
新型ELS-BODEN 電子束光刻系統(tǒng)
ELS Series
ELS-BODEN Ó
Fastest in the industry!
業(yè)內(nèi)!
High speed scanning at 400MHz clock frequency for production
高速掃描400MHz頻率生產(chǎn)
Key Product Features
關(guān)鍵產(chǎn)品特性Fastest in the industry!
• The industry's fastest 400 MHz high speed scanning
業(yè)界的400mhz高速掃描
High speed beam scanning, 4 times faster than our previous products.
高速光束掃描，比我們以前的產(chǎn)品快4倍。
High current and narrow beam pitch, which was not possible until now.
大電流和窄波束間距，這是不可能的，直到現(xiàn)在。
The new system achieves faster and higher quality writing. It is ideal for the MPWS (field-polymerized writing).
新系統(tǒng)實(shí)現(xiàn)更快和更高質(zhì)量的刻寫。它是MPWS(現(xiàn)場聚合刻寫)的理想選擇。
• Faster stage speed
階段的速度更快
Redesigned the stage to meet the demands of production applications and achieved higher speeds.
重新設(shè)計(jì)了工作臺，以滿足生產(chǎn)應(yīng)用的要求，并實(shí)現(xiàn)了更高的速度。
• Inherits traditional Elionix technology
繼承了傳統(tǒng)的Elionix技術(shù)
150kV/125kV if the ultra-fine patterns are most important.
150kV/125kV如果超細(xì)圖案是最重要的。
100 kV for common system and wide variety of applications
100kv用于普通系統(tǒng)和廣泛的應(yīng)用
50 kV for high speed writing for the production.
50kv用于高速寫作，用于生產(chǎn)。
It can meet user's several requirements.
能滿足用戶多方面的要求。
Specification 規(guī)格參數(shù)：
Emitter發(fā)射器 | ZrO/W thermal field emitter熱場發(fā)射體 | |||
Acceleration Voltage 加速電壓 | 50kV | 100kV | 125kV | 150kV |
Beam Current 電子束電流 | 1nA to 1µA | 20pA to 100nA | 5pA to 100nA | 5pA to 100nA |
Minimum Beam Diameter 最小電子束直徑 | Φ5nm | Φ1.8nm | Φ1.7nm | Φ1.5nm |
Standard Field Size 標(biāo)準(zhǔn)寫場直徑 | 1000µm square | 1000µm square | 500µm square | 500µm square |
Min. / Max. Field size 最小/寫場尺寸 | Min. 100µm square | |||
Scan Clock 掃描頻率 | Max. 400MHz | |||
Minimam Shot Pitch 最小投射距離 | 0.2nm | |||
Maximum Specimen Size樣品尺寸 | 8" wafer / 12" wafer | |||
Maximum Exposure Area 曝光面積 | 200mm × 200mm / 300mm × 300mm | |||
Loading System 加載系統(tǒng) | Single cassette auto loader 單盒式自動(dòng)裝載機(jī) 多盒式自動(dòng)裝載機(jī) 12" FOUP 機(jī)器人裝載機(jī) 帶PEB的機(jī)器人裝載機(jī) 可變晶片尺寸的機(jī)器人裝載機(jī)
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Software 軟件 | elms • Beam conditions •電子束條件 •接觸的時(shí)間表 •圖形數(shù)據(jù)轉(zhuǎn)換器 •賬戶管理 •Python腳本
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