Model 6000型 OAI 掩膜光刻機(jī)

OAI 掩膜光刻機(jī) Model 6000型的特點(diǎn)和優(yōu)點(diǎn)

•高吞吐量（180 wph，掩模模式)和生產(chǎn)和研發(fā)的運(yùn)行成本

•ABO光學(xué)與光均質(zhì)器，以實(shí)現(xiàn)所需各種電阻的分辨率和曝光

•用于大深度Foucs的特殊光學(xué)

•靈活處理基板從2“平方到12”平方

•可手動(dòng)或自動(dòng)上料

配置。

•系統(tǒng)配置頂部和/或底部側(cè)面/ IR 自動(dòng)對準(zhǔn)Vision ProR軟件

•適用于各種基材尺寸和類型

•基于Windows的軟件

•菜單驅(qū)動(dòng)的GUI與工藝配方存儲(chǔ)

•全場曝光，提高吞吐量

•頂部加載支架，方便，快速，安全的更換

•可選調(diào)平零接觸處理

•雙臂4軸機(jī)器人搬運(yùn)系統(tǒng)(可選)

•自調(diào)平工裝隔振

•的服務(wù)支持(約95%的服務(wù)水平)

Mask Aligner - Model 6000 Features and Benefits

• High throughput (180 wph, first mask mode) and Lowest Cost of operation for production and R&D
• ABO Optics with light homogenizer to achieve required resolutions & exposures for various resists
• Special Optics for Large Depth of Foucs
• Flexibility with substrate handling from 2”sq to 12”sq
• Comes in manual loading or automated loading configurations.
• System configuration with top and/or bottom side / IR auto alignment with Cognex Vision ProR Software
• Adaptable to various substrate sizes and types
• Windows based software
• Menu driven GUI with process recipe storage
• Full field exposure for higher throughput
• Top load mask holder for easy, fast and safe mask replacements
• Optional Global leveling for zero contact processing
• Dual arm 4-axis robot handling system (optional)
• Self leveling tooling vibration isolation
• Superior service support (~95% service level)