原子力顯微鏡 Ambient AFM MFM 產(chǎn)品優(yōu)勢:
可選掃描模式
? Scanning Tunneling Microscope (STM)
? Piezo Response Force Microscope (PrFM)
? Kelvin Probe Force Microscope (KPFM)
? Scanning Spreading Resistance Microscope (SSRM)
? Conductive AFM
? Capacitance Force Microscopy (CFM)
? Force Modulation Microscopy (FMM)
? AFM Spectroscopies
? Nanoindentation
? Nanolitography
Maximum Z Resolution
? <0.03nm with 100μmx100μm scanner
? <0.01nm with 40μmx40μm scanner
? <0.005nm with 4μmx4μm scanner
Static/Dynamic RMS Cantilever Z Noise
? <25fm √Hz noise floor with laser RF modulation
Scan Range
? 4x4x2 μm or 40x40x4 μm or 100x100x8 μm
STM Current Range
? 1pA-10nA, < 10fA / √Hz noise floor
Maximum Sample Size/Height
? 30x30x10 mm
Approach
? Software controlled
? Motorized
? <50 mm range with <250 nm sensivity
Camera
? CCD analog colour camera
Camera Resolution
? < 2 μm
Light Source for Optical Microscope
? White LED, adjustable from software
Signal Processing
? 16 bit ADCs / 24 bit DACs
? Digital feedback with FPGA / DSP
? Simultaneous scan of 16 channels
up to 4096x4096 pixels
Cantilevers
? All of the commercial cantilevers can be used
Acoustic and Vibration Isolation
? Multilayer acoustic enclosure 180°access
0.3Hz passive vibration isolation table