High speed, safe and smooth wafer handling
Automatic wafer size detection
Full set of inspection type come as standard: All wafers, programmed, random and statistical
Cassette laser mapping, wafer protrusion, cross-slot detection and critical handling conditions come as standard safety features
PC based controller, Windows 10
Touch screen interface
Designed for Leica DM8000, compatible with many semiconductor inspection microscopes like Nikon, Olympus, Zeiss
Basic bright light inspection available as option